The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell

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Xu, Lujia
Weber, Klaus
Phang, Sieu Pheng
Hamieri, Ziv
Franklin, Evan
Fell, Andreas

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IEEE Electron Devices Society

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Laser doping of semiconductors has been the subject of intense research over the past decades. Previous work indicates that the use of SiO 2/SiN \rm x stacks instead of a single dielectric film as the anti-reflection coating and passivation layer results

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IEEE Journal of Photovoltaics

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2037-12-31