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Comparison of the thermal stabilityof thermally grown silicon dioxide on silicon before and after LPCVD deposition

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dc.contributor.authorJin, Haoen_AU
dc.contributor.authorZellweger, Hansen_AU
dc.contributor.authorWeber, Klausen_AU
dc.contributor.authorJohnson, Lukeen_AU
dc.contributor.authorBlakers, Andrewen_AU
dc.coverage.spatialCanberra Australia
dc.date.accessioned2015-12-07T22:55:15Z
dc.date.createdSeptember 13-15 2006
dc.date.issued2006
dc.date.updated2015-12-07T12:54:10Z
dc.identifier.isbn0975065041
dc.identifier.urihttp://hdl.handle.net/1885/28307
dc.publisherAustralian and New Zealand Solar Energy Society (ANZSES)
dc.relation.ispartofseriesAustralia and New Zealand Solar Energy Society Conference (Solar 2006)
dc.sourceProceedings of the Conference of the Australia and New Zealand Solar Energy Society (Solar 2006)
dc.source.urihttp://www.anzses.org
dc.titleComparison of the thermal stabilityof thermally grown silicon dioxide on silicon before and after LPCVD deposition
dc.typeConference paper
local.bibliographicCitation.startpage5
local.contributor.affiliationJin, Hao, College of Engineering and Computer Science, ANU
local.contributor.affiliationZellweger, Hans, College of Engineering and Computer Science, ANU
local.contributor.affiliationWeber, Klaus, College of Engineering and Computer Science, ANU
local.contributor.affiliationJohnson, Luke, College of Engineering and Computer Science, ANU
local.contributor.affiliationBlakers, Andrew, College of Engineering and Computer Science, ANU
local.contributor.authoruidJin, Hao, u4065013
local.contributor.authoruidZellweger, Hans, u4250142
local.contributor.authoruidWeber, Klaus, u9116880
local.contributor.authoruidJohnson, Luke, u4249342
local.contributor.authoruidBlakers, Andrew, u9113453
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.absfor090699 - Electrical and Electronic Engineering not elsewhere classified
local.identifier.absfor091299 - Materials Engineering not elsewhere classified
local.identifier.absseo850504 - Solar-Photovoltaic Energy
local.identifier.ariespublicationu4251866xPUB57
local.type.statusPublished Version

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