Linearization and minimization of cyclic error with heterodyne laser interferometry
Date
2012-07-01
Authors
McRae, Terry G
Hsu, Magnus T L
Freund, Christopher H
Shaddock, Daniel A
Herrmann, Jan
Gray, Malcolm B
Journal Title
Journal ISSN
Volume Title
Publisher
Optical Society of America
Abstract
We present a method for the linearization and minimization of interferometer cyclic error. We utilize a polynomial curve fitting and resampling algorithm to correct for nonlinear mirror displacement. In the frequency domain, this algorithm compresses cyclic error into a single-frequency component and enables the precise measurement of cyclic error in a noise-dominated environment. We have applied the technique to determine the cyclic error for a range of interferometer components. In addition, we have used these measurements to optimize interferometer configuration and performance such that we routinely achieve a cyclic error of ∼50 pm for our custom Glan-Laser interferometer and ∼100 pm for a commercial interferometer.
Description
Keywords
Keywords: Commercial interferometers; Cyclic errors; Frequency domains; Heterodyne laser interferometry; Nonlinear mirrors; Polynomial curve fitting; Precise measurements; Resampling algorithms; Single-frequency; Algorithms; Curve fitting; Laser interferometry; Lin
Citation
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Source
Optics letters
Type
Journal article
Book Title
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Access Statement
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DOI
10.1364/OL.37.002448