Micropatterning Layers by Flame Aerosol Deposition-Annealing

Abstract

A study was conducted to direct synthesis, deposition, and stabilization of well-defined nanoparticle patterns on microelectronic substrates by using flame aerosol technology. The study produced gas-sensitive metal oxide layers micropatterned on an integrated-circuitry substrates. The aerosol-based method includes sputtering, spray pyrolysis, cluster beam deposition, classified aerosol deposition, combustion chemical vapor deposition, and flame spray pyrolysis (FSP). It was observed during the study that the metal oxide nanoparticle synthesis occur due to dispersion of a precursor spray solution. The study also found that the combustion can result to metal oxide crystallites depending on the composition of the solution. It was found that the particle size can be controlled by the particle presence in the high temperature area.