Study of Diffusivity and Electrical Properties of Zr and Hf in Silicon
dc.contributor.author | Vyvenko, O F | |
dc.contributor.author | Sachdeva, R | |
dc.contributor.author | Istratov, A A | |
dc.contributor.author | Armitage, R | |
dc.contributor.author | Weber, E R | |
dc.contributor.author | Deenapanray, Prakash | |
dc.contributor.author | Jagadish, Chennupati | |
dc.contributor.author | Gao, Yue | |
dc.contributor.author | Huff, H R | |
dc.coverage.spatial | Philadelphia, Pennsylvania, USA | |
dc.date.accessioned | 2015-12-13T22:22:52Z | |
dc.date.available | 2015-12-13T22:22:52Z | |
dc.date.created | Mar 22 2002 | |
dc.date.issued | 2002 | |
dc.date.updated | 2015-12-11T08:00:46Z | |
dc.identifier.isbn | 1-56677-373-3 | |
dc.identifier.uri | http://hdl.handle.net/1885/72479 | |
dc.publisher | Electrochemical Society Inc | |
dc.relation.ispartofseries | Semiconductor Silicon 2002 | |
dc.source | Proceedings of the Ninth International Symposium on Silicon Materials Science and Technology | |
dc.title | Study of Diffusivity and Electrical Properties of Zr and Hf in Silicon | |
dc.type | Conference paper | |
local.bibliographicCitation.lastpage | 451 | |
local.bibliographicCitation.startpage | 440 | |
local.contributor.affiliation | Vyvenko, O F, University of California | |
local.contributor.affiliation | Sachdeva, R, University of California | |
local.contributor.affiliation | Istratov, A A, University of California | |
local.contributor.affiliation | Armitage, R, University of California | |
local.contributor.affiliation | Weber, E R, University of California | |
local.contributor.affiliation | Deenapanray, Prakash, College of Physical and Mathematical Sciences, ANU | |
local.contributor.affiliation | Jagadish, Chennupati, College of Physical and Mathematical Sciences, ANU | |
local.contributor.affiliation | Gao, Yue, Electro Optic Systems Pty Ltd | |
local.contributor.affiliation | Huff, H R, International SEMATECH, Inc. | |
local.contributor.authoremail | u9212349@anu.edu.au | |
local.contributor.authoruid | Deenapanray, Prakash, u4018937 | |
local.contributor.authoruid | Jagadish, Chennupati, u9212349 | |
local.description.notes | Imported from ARIES | |
local.description.refereed | Yes | |
local.identifier.absfor | 091207 - Metals and Alloy Materials | |
local.identifier.ariespublication | MigratedxPub3269 | |
local.identifier.uidSubmittedBy | Migrated | |
local.type.status | Published Version |