Thermal stability of the passivation of phosphorus diffused silicon surfaces by PECVD silicon nitride
Date
2005
Authors
Tan, Jason
Cuevas, Andres
Winderbaum, Saul
Roth, Kristin
Journal Title
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Volume Title
Publisher
WIP-Renewable Energies
Abstract
Description
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Citation
Collections
Source
Proceedings of the 20th European Photovoltaic Solar Energy Conference
Type
Conference paper