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Comparison of plasma NH3 and atomic H effects to Si-SiO2 interface

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Date

2006

Authors

Jin, Hao
Weber, Klaus
Jayaprasad, A
Blakers, Andrew

Journal Title

Journal ISSN

Volume Title

Publisher

Academic Press

Abstract

Description

Keywords

Citation

URI

http://hdl.handle.net/1885/28620

Collections

ANU Research Publications

Source

Type

Conference paper

Book Title

Entity type

Access Statement

License Rights

DOI

Restricted until

2037-12-31

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01_Jin_Comparison_of_plasma_NH3_and_2006.pdf (182.69 KB)

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