Wafer-level flame-spray-pyrolysis deposition of gas-sensitive layers on microsensors

Kuhne, S; Graf, M; Tricoli, Antonio; Mayer, F; Pratsinis, S.E; Hierlemann, A

Wafer-level flame-spray-pyrolysis deposition of gas-sensitive layers on microsensors

Date

2008

Authors

Kuhne, S

Graf, M

Tricoli, Antonio

Mayer, F

Pratsinis, S.E

Hierlemann, A

Publisher

IOP Publishing

Abstract

This paper presents a CMOS-compatible wafer-level fabrication process for monolithic CMOS/MEMS sensor systems coated with sensitive layers directly deposited by means of flame spray pyrolysis (FSP). Microhotplate (νHP)-based devices, featuring an FSP dir